Ion Guns:  Model 1403Cs - Cesium/Alkali Ions

Design Features
  • User replaceable frit ion source allowing production of various ion species
  • Adjustable spot size from 75um to >1mm for spatially defined sputtering
  • Continuous variable beam energy up to 5keV
  • Continuously variable beam energy up to 5keV
  • Neutral species suppression using beam bending optics
  • Beam blanking capability for TOF SIMS
  • Integral beam current monitoring capability
  • Option beam bunching electrode
  • All UHV compatible and etch resistant materials used in fabrication
  • Pre-objective lens deflection for reduced spot size
  • Differential pumping to minimize main chamber gas loading
Guaranteed Performance @ 5.0 keV Ar Ions, 35mm W.D.

 Mode  Spot Size
Beam Current
Current Density
 Large Spot
 125 400 µA

 Small Spot
 75 100 µA

Model 1403C Schematic

System Integration Details