Ion Guns:  Model 1407 - Duoplasmatron Equavalent



Design Features
  • Duoplasmatron level performance from an electron impact source
  • Adjustable spot size ≥ 15µm for spatially defined sputtering
  • Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300
  • Continuously variable beam energy up to 5keV
  • Dual octupole for beam scanning and astigmatism correction
  • Pre-objective lens deflection for reduced spot size
  • Integral beam current monitoring capability
  • No direct filament to sample line of sight to avoid unwanted sample contamination
  • Replaceable beam trimming aperture with typical life-time of > 500 hours
  • Dual filaments provide operational backup with typical filament life-time > 500 hours
  • Internal source pressure sensor permits monitoring of ion source pressure
  • All UHV compatible and etch resistant materials used in fabrication
  • Differential pumping to minimize main chamber gas loading
  • Operates over the range of inert gas species

 
Guaranteed Performance @ 5.0 keV Ar Ions

 Mode  Spot Size
(µm)
Beam Current
Current Density
(mA/cm2
 Large Spot
 75 20 µA
450
 Medium Spot
 25 5 µA
1018
 Small Spot
 15 500 µA
280
 
Engineering Specifications


 Working Distance
 10 mm
 Beam Energy
 ≤ 5 keV continuously variable
 Raster Size
 3 x 3 mm (minimum)
 Mounting Flange
 114 mm (4.5 in) O.D. C.F.
 Differential Pumping
 70 mm (2.75 in) O.D. C.F.
 Supply Gas Inlet
 34 mm (1.33 in) O.D. C.F.
 Source Gases
 He, Ne, Ar, Kr, Xe
 Bake-out Temperature
 150° C maximum

System Integration Details


Note: 150 mm O.D. CF and other custom flanges optional. All measurements not specified are in inches.




Model 1403A Controller (Compatible with the 1407)

View the specifications for the power supply/controller of the 1407.

Typical Performance Data

View the graphs for the Model 1407 Ion Gun when working under typical conditions below.

  • Measured Beam Profiles
All profiles were made by 5.0 keV Ar Ions.

The Faraday cup pinhole diameter was ≈ 10 µm.